MATLAB/simulink model of a MEMS accelerometer read-out circuit

Differential read-out circuit for capacitive sensors

A Modular Mems Accelerometer Concept

Presently, main applications can be found in the automotive market segment (e.g. front and side airbag sensors, ESP respectively chassis stabilization, active suspension, roll over detection). However, low-g sensors enter also new application areas like inclinometry and vibration sensing for instance for anti-theft devices or activity monitoring for pacemaker control. Like in the microelectroni...

MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out

We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...

MEMS Accelerometer Readout

You work in a characterization laboratory af a MEMS company, and you have to design an electronic board in order to test a given capacitive accelerometer. The application of the sensor is vibration monitoring on a mechanical engine in a specific frequency range (from 40 Hz to 400 Hz). The MEMS device has a mass of 8nK g , a mechanical stiffness of 5N /m and a quality factor Q = 2. The capacitiv...

A 1 mG lateral CMOS-MEMS accelerometer

This paper reports a lateral CMOS-MEMS accelerometer with a measured noise floor of 1mG/ and a dynamic range larger than 13G. The accelerometer is fully compatible with conventional CMOS processes enabling the integration of most of the conditioning circuits. It is fabricated in a three metal layer 0.5μm CMOS process followed by a two-step dry etch release. An improved curl matching technique i...